http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2013051064-A1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2201-016 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01H2057-006 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00976 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01H57-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-2042 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01H57-00 |
| filingDate | 2011-10-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2015-03-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-WO2013051064-A1 |
| titleOfInvention | MEMS switch |
| abstract | A MEMS switch that is easy to manufacture and that can effectively suppress sticking is provided. A MEMS switch includes a fixed support portion, a plate-like flexible beam having at least one end fixedly supported by the fixed support portion and having an extending movable surface, and a movable member disposed on the movable surface of the flexible beam. The position of the electrical contact and the fixed support portion is fixed, the fixed electrical contact facing the movable electrical contact, and the movable support extends from the fixed support portion toward the movable electrical contact above the movable surface of the flexible beam and is voltage driven. A first piezoelectric drive element capable of displacing the movable electric contact toward the fixed electric contact, and a direction in which the movable electric contact is separated from the fixed electric contact by being driven by voltage and at least arranged on the movable surface of the flexible beam And a second piezoelectric drive element for driving the movable part of the flexible beam. |
| priorityDate | 2011-10-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 35.