http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2013047753-A1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C51-46 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C59-026 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C51-262 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C2059-023 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C59-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C51-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C59-021 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29C51-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29C51-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29C51-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29C51-36 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29C59-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B1-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29C51-42 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate | 2012-09-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2015-03-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-WO2013047753-A1 |
| titleOfInvention | Molding apparatus and molding method, imprint mold, and imprint method using the imprint mold |
| abstract | Molding apparatus and molding method capable of molding a three-dimensional shape on a film having a fine pattern, an imprint mold capable of transferring a fine pattern onto the surface of the three-dimensional shape, and an imprint method using the imprint mold I will provide a. A forming apparatus for forming a three-dimensional shape exceeding the thickness of the film 20 on the film 20 having the fine pattern 20a, the pressurizing chamber 30 for pressurizing the film 20 with fluid from the fine pattern 20a side, and the A pressurizing section 3 having a pressurizing means 35 for adjusting the pressure of the fluid in the pressurizing chamber 30; a pressure receiving stage 32 having a three-dimensional pressure receiving surface 321 and supporting the film 20; And a temperature control unit for adjusting the temperature. Using this forming apparatus, a three-dimensional shape is formed on the film 20 on which the fine pattern is formed. In addition, this is applied to the imprint technique as an imprint mold. |
| priorityDate | 2011-09-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 25.