http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2013024779-A1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07D311-96 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0271 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G8-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-094 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-091 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-09 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-11 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07D311-78 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07D311-96 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11 |
| filingDate | 2012-08-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2015-03-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-WO2013024779-A1 |
| titleOfInvention | Lower layer film forming material for lithography, lower layer film for lithography and pattern forming method |
| abstract | A novel material for forming a lower layer film for lithography, which has a high carbon concentration, a low oxygen concentration, a relatively high heat resistance, a relatively high solvent solubility, and can be applied to a wet process. The underlayer film forming material for lithography of the present invention is characterized by containing a compound represented by the following general formula (1). [Chemical 1] (In formula (1), each X is independently an oxygen atom or a sulfur atom, and each R 1 is independently a single bond or a 2n-valent hydrocarbon group having 1 to 30 carbon atoms, The hydrocarbon group may have a cyclic hydrocarbon group, a double bond, a hetero atom, or an aromatic group having 6 to 30 carbon atoms, and each R 2 independently represents 1 to 10 carbon atoms. A linear, branched or cyclic alkyl group, an aryl group having 6 to 10 carbon atoms, an alkenyl group having 2 to 10 carbon atoms, or a hydroxyl group, provided that at least one of R 2 is a hydroxyl group, and m is And each independently represents an integer of 1 to 6, and n is an integer of 1 to 4.) |
| priorityDate | 2011-08-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 728.