http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2012133687-A1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-265 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B32B9-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-022 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B65D65-42 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D1-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-56 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-562 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-584 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-42 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B9-00 |
| filingDate | 2012-03-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2014-07-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-WO2012133687-A1 |
| titleOfInvention | Barrier vapor deposition film |
| abstract | Provided is a barrier-deposited film having a uniform film quality, a dense film density, and a deposited layer having a high initial barrier property. A barrier vapor deposition film comprising at least one vapor deposition layer (a) below on at least one surface of a substrate. Vapor deposition layer (a): a vapor deposition layer made of a metal oxide and having a thickness of 10 to 500 nm. When the vapor deposition layer is analyzed in the depth direction by X-ray photoelectron spectroscopy (ESCA), oxygen (O) and metal The average value of the element ratio [oxygen (O) / metal] is 1.20 or more and 1.90 or less, and the difference between the maximum value and the minimum value of [oxygen (O) / metal] is 0.35 or less. |
| priorityDate | 2011-03-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 132.