http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2012133040-A1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-038 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C43-225 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C43-23 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
| filingDate | 2012-03-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2014-07-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-WO2012133040-A1 |
| titleOfInvention | Calixarene derivatives |
| abstract | Following formula (1) (Wherein X, Y and Z are each a hydrogen atom or a halogen atom, R 1 is an alkyl group or an acetyl group, and R 2 and R 3 are each a hydrogen atom or a halogenated methyl group, n is an integer of 0 to 3, R 1, R 2, and when R 3 is present in plural, the plurality of R 1, R 2, and R 3, Each may be the same group or different groups.) Is provided. The calixarene derivative is useful as an electron beam resist material suitable for fine processing. |
| priorityDate | 2011-03-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 28.