http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2012124593-A1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K71-16 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K71-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-542 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-243 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-562 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L51-50 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05B33-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-24 |
| filingDate | 2012-03-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2014-07-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-WO2012124593-A1 |
| titleOfInvention | Vapor deposition particle injection apparatus and vapor deposition apparatus |
| abstract | The vapor deposition particle injection device (501) of the present invention is connected to vapor deposition particle generators (110) and (120) that generate vapor deposition particles by heating vapor deposition materials (114) and (124), and the above vapor deposition. A nozzle unit (170) having an injection port (171) for injecting vapor deposition particles generated by the particle generation units (110) and (120) to the outside. The vapor deposition material capacity of the vapor deposition particle generator (120) is smaller than the vapor deposition material capacity of the vapor deposition particle generator (110). |
| priorityDate | 2011-03-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 56.