http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2012114963-A1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0382 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-038 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-325 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2041 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0047 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0046 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-004 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate | 2012-02-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2014-07-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-WO2012114963-A1 |
| titleOfInvention | Negative pattern forming method and photoresist composition |
| abstract | An object of the present invention is a negative pattern forming method using an organic solvent as a developer, which can suppress the roughness of the exposed surface after development and can form a desired fine pattern with high sensitivity. A negative pattern forming method that can be used, and a photoresist composition used therefor. The present invention provides (1) a process of forming a resist film on a substrate using a photoresist composition containing [A] a polymer containing the structural unit (I) having an acid generating ability and [F] an organic solvent. (2) A negative pattern forming method including a step of exposing the resist film, and (3) a step of developing the exposed resist film with a developer containing an organic solvent. |
| priorityDate | 2011-02-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 523.