http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2012090665-A1
Outgoing Links
Predicate | Object |
---|---|
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-50 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-545 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K50-841 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K50-844 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-402 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-0272 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D1-60 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D3-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D7-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B27-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B9-00 |
filingDate | 2011-12-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate | 2014-06-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-WO2012090665-A1 |
titleOfInvention | Method for producing gas barrier film, gas barrier film and electronic device |
abstract | An object of this invention is to provide the manufacturing method of the gas barrier film which can manufacture the gas barrier film which has the production suitability of a roll-to-roll system, and is excellent in gas barrier performance. In the present invention, on the first barrier layer formed on the substrate, a coating liquid is formed by applying a coating liquid containing a polysilazane compound, and a vacuum light source is irradiated by a light source, An ultraviolet ray irradiation step for forming a second barrier layer, and the vacuum ultraviolet ray illuminance on the coating surface that the coating film receives from the start to the end of the vacuum ultraviolet ray irradiation is 160 mW / cm 2 or less; illuminance of the vacuum ultraviolet rays in the film surface 50 mW / cm 2 or more, 160 mW / cm 2 have at that time T or less, subjected to the T, the energy amount of the coating film surface, 180 mJ / cm 2 or more 1800 mJ / cm It is related with the manufacturing method of the gas barrier film which is 2 or less. |
priorityDate | 2010-12-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 427.