http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2012073938-A1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-4966 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-318 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28088 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45523 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28556 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45527 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28562 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-34 |
| filingDate | 2011-11-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2014-05-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-WO2012073938-A1 |
| titleOfInvention | Semiconductor device manufacturing method, substrate processing method, and substrate processing apparatus |
| abstract | A step of accommodating the substrate in the processing chamber, and a step of supplying a source gas containing a metal element, a nitrogen-containing gas, and a hydrogen-containing gas into the processing chamber to form a metal nitride film on the substrate. In the step of forming a film, the source gas and the nitrogen-containing gas are intermittently supplied into the processing chamber, the source gas and the nitrogen-containing gas are intermittently supplied alternately into the processing chamber, or the nitrogen containing into the processing chamber is contained. The source gas is intermittently supplied into the processing chamber while the gas supply is continued, and the hydrogen-containing gas is supplied into the processing chamber at least during the supply period of the nitrogen-containing gas into the processing chamber. |
| priorityDate | 2010-11-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 76.