| abstract |
Polymer component (A), radiation sensitive acid generator (B), solvent represented by general formula (C1-a), solvent represented by general formula (C1-b), and general formula (C1 A solvent component (C) containing at least one selected from the group consisting of solvents represented by -c), and a radiation-sensitive composition. However, in the following general formula, R 1 to R 5 each independently represents an organic group, k is 1 to 10, l is 2 to 5, a is 0 to 12, b is 0, m and n Are each independently 2-4. |