http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2011105129-A1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32134 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0041 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-322 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0337 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-32 |
| filingDate | 2011-01-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2013-06-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-WO2011105129-A1 |
| titleOfInvention | Etching solution for copper oxide and etching method using the same |
| abstract | Provided are an etching solution for copper oxide that can selectively etch exposed and unexposed portions when exposed to laser light using a copper oxide as a heat-reactive resist material, and an etching method using the same. about. An etching solution for copper oxide according to the present invention is an etching solution for copper oxide for selectively etching copper oxides having different oxidation numbers in a copper oxide-containing layer containing copper oxide as a main component, and at least a chelating agent Or a salt thereof. |
| priorityDate | 2010-02-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 205.