| abstract |
Provided is a method for forming a metal oxide film having surface irregularities and / or a predetermined pattern and having little variation in surface resistivity, light transmittance, and the like, and such a metal oxide film. A method for forming a metal oxide film having surface irregularities and / or a predetermined pattern on a substrate, and forming a metal salt film by applying a liquid material containing a metal salt to the substrate A first step, a second step of providing surface irregularities or a predetermined pattern on the metal salt film, and a third step of performing a thermal oxidation process or a plasma oxidation process on the metal salt film to form a metal oxide film And including. |