| abstract |
The present invention provides a positive photosensitive resin composition for spray coating, which contains an alkali-soluble resin, a compound that generates an acid by light, and a solvent, and has a viscosity of 0.5 to 200 cP. By using the positive photosensitive resin composition, a uniform coating film can be formed on the inner surface of the hole having a high aspect ratio. By using a coating film pattern obtained by exposing and developing a predetermined area of the obtained coating film as an insulating film or a mask for forming a pattern of the insulating film, generation of a leak current inside the hole is suppressed, and the through electrode Can be formed with high yield. |