http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2010032679-A1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-42 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28556 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01G53-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28079 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-285 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-28 |
| filingDate | 2009-09-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2012-02-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-WO2010032679-A1 |
| titleOfInvention | Nickel-containing film forming material and method for producing nickel-containing film |
| abstract | [PROBLEMS] To provide a nickel-containing film-forming material in which carbon does not easily remain in a nickel-containing film and HF is not easily produced as a by-product in film formation by CVD (chemical vapor deposition). Furthermore, the present invention provides a nickel-containing film forming material in which the nickel-containing film is a nickel silicide film. [Solution] The nickel-containing film-forming material of the present invention contains at least one nickel complex having four ligands, and the type of the ligand is CO, PF 3 , PF 2 (CF 3 ), or PF. (CF 3 ) 2 , P (CF 3 ) 3 , PF 2 R 1 , PFR 2 R 3 , PF 2 NR 4 R 5 , P (CF 3 ) 2 CH 2 CH 2 P (CF 3 ) 2 and P (CF 3) 2 CF 2 CF 2 P (CF 3) 2 consisting of the group (provided that the R 1 to R 5 are each independently, H, an alkyl group or a phenyl group having 1 to 6 carbon atoms, P (CF 3) 2 CH 2 CH 2 P (CF 3 ) 2 and P (CF 3 ) 2 CF 2 CF 2 P (CF 3 ) 2 are equivalent to two ligands.) It is characterized by. |
| priorityDate | 2008-09-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 55.