http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2010007874-A1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-11 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-38 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0274 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-095 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0392 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-11 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-095 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-38 |
| filingDate | 2009-06-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2012-01-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-WO2010007874-A1 |
| titleOfInvention | Method for modifying first film and composition for forming acid transfer resin film used therefor |
| abstract | An object of the present invention is to provide a first film modification method for modifying a first film using a second film, and in particular, even if an acid generator is not contained in the first film to be patterned. An object of the present invention is to provide a method for modifying a first film capable of forming a pattern using a photolithography process and a composition for forming an acid transfer resin film used therefor. That is, this modification method exposes the second film 20 through the mask 30 and the step (I) of forming the second film 20 containing the acid generator on the first film 10 having the acid dissociable group. Then, the step (II) for generating acid, the step (III) for transferring the acid generated in the second film 20 to the first film 10, and the step (IV) for removing the second film 20 in this order. Prepare. [Selection] Figure 1 |
| priorityDate | 2008-07-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 331.