http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2010007816-A1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-07314 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-067 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R3-00 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-06755 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-067 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-00 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-073 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-067 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 |
| filingDate | 2009-04-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2012-01-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-WO2010007816-A1 |
| titleOfInvention | probe |
| abstract | The probe has a contact portion that contacts the object to be inspected. Inside the contact portion, conductive contact particles are dispersed and arranged uniformly. Some contact particles protrude from the surface of the contact portion on the inspection object side. A conductive member having elasticity is disposed on the surface of the contact portion opposite to the object to be inspected. The probe further includes an insulator sheet in which a through hole is formed, and the contact portion is disposed through the through hole. The upper part of the contact portion is made of a conductor that does not contain contact particles. Another conductor is further arranged on the surface of the conductor opposite to the object to be inspected. |
| priorityDate | 2008-07-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 28.