http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2009096495-A1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02024 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1436 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3212 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31053 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00 |
| filingDate | 2009-01-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2011-05-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-WO2009096495-A1 |
| titleOfInvention | Polishing composition and polishing method using the same |
| abstract | The polishing composition according to the first aspect of the present invention contains a nitrogen-containing compound and abrasive grains, and has a pH of 1 to 7. The nitrogen-containing compound contained in the polishing composition has a general formula: R 1 —N (—R 2 ) —R 3 (where R 1 , R 2 , and R 3 are each an alkyl group or an alkyl group having a characteristic group) complex but represents an addition to the group, two of R 1 to R 3 is may be composed of part of a heterocyclic ring, two of R 1 to R 3 is common, with the remaining one Or a carboxybetaine amphoteric surfactant, a sulfobetaine amphoteric surfactant, an imidazoline amphoteric surfactant, and an amine oxide amphoteric surfactant. It is preferably one of surfactants. The polishing composition according to the second aspect of the present invention contains a water-soluble polymer and abrasive grains, does not contain an oxidizing agent, and has a pH of 1-8. |
| priorityDate | 2008-02-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 585.