http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2009081746-A1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T83-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T83-145 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T83-533 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B49-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B28D5-0064 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-301 |
| filingDate | 2008-12-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2011-05-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-WO2009081746-A1 |
| titleOfInvention | Dicing apparatus and dicing method |
| abstract | A dicing apparatus according to an aspect of the present invention includes a work table on which a work is placed, a processing unit that processes the work, an imaging unit that images the work on the work table, the work table, A plurality of moving means for relatively moving the processing means and the imaging means, and a moving means that is the same as the work table so as to face the imaging means, toward the direction in which the imaging means is provided And an alignment camera for imaging. According to such a dicing apparatus, it is possible to easily measure the relative position between the imaging means and the processing means without processing the dummy workpiece, and good dicing processing can be performed without reducing the efficiency of the dicing apparatus. Is possible. |
| priorityDate | 2007-12-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415821907 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID122034 |
Total number of triples: 15.