http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2009044668-A1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-111 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-108 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0392 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0047 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0046 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F220-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-00 |
| filingDate | 2008-09-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2011-02-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-WO2009044668-A1 |
| titleOfInvention | Radiation sensitive composition |
| abstract | The radiation-sensitive composition of the present invention becomes alkali-soluble by the action of an acid and does not contain a fluorine atom, a repeating unit (b1) represented by the following general formula (1), and A second polymer (B) containing a repeating unit (b2) containing a fluorine atom and a radiation-sensitive acid generator (C), and the second polymer (B) A resist film containing 0.1 to 20 parts by mass with respect to 100 parts by mass of the combined (A) and capable of satisfactorily suppressing the occurrence of watermark defects and bubble defects, which are defects derived from immersion exposure. It is a radiation-sensitive composition that can be formed. (In General Formula (1), R 1 represents a methyl group or the like, and R 2 represents a linear or branched alkyl group having 1 to 12 carbon atoms.) |
| priorityDate | 2007-10-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 573.