| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N1-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-0817
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-31745
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N1-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-0807 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3005
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3056
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-08 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-244
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J27-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-317 |
| filingDate |
2008-08-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2010-11-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-WO2009020151-A1 |
| titleOfInvention |
Composite focused ion beam apparatus and processing observation method and processing method using the same |
| abstract |
The present invention includes a first ion beam irradiation system 10 including a liquid metal ion source that generates first ions, and a second ion beam irradiation system 20 including a gas field ion source that generates second ions. The beam diameter of the second ion beam 20A emitted from the second ion beam irradiation system 20 is the beam diameter of the first ion beam 10A emitted from the first ion beam irradiation system 10. Smaller than. |
| priorityDate |
2007-08-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |