| abstract |
The manufacturing method and apparatus of a colorless and transparent resin film with favorable heat resistance and flatness which have the following process (1), process (2), and process (3). (1) A step of casting a polyamic acid or a polyimide solution on a support. (2) A process of volatilizing an organic solvent while blowing a gas having an oxygen content of 0.001 to 15% by volume and 100 to 170 ° C. on a cast on the support, and peeling it from the support as a self-supporting film. (3) A step of performing the following step (3-1) and step (3-2) in this order. (3-1) Using one or more dryers in the form of blowing heated gas, the residual ratio of organic solvent in the film while blowing a gas having an oxygen content of 15% by volume or less and 100 to 250 ° C. to the self-supporting film The process of reducing. (3-2) Using one or more dryers in the form of spraying heated gas, the residual ratio of organic solvent in the film while blowing a gas having an oxygen content of 5% by volume or less and 150 to 400 ° C. to the self-supporting film The process of reducing. |