| abstract |
The Si—O-containing hydrogenated carbon film as an optical film has a refractive index in the range of 1.48 or more and 1.85 or less with respect to light having a wavelength of 520 nm, and is less than 0.15 with respect to light having a wavelength of 248 nm. It has an extinction coefficient, and its refractive index and extinction coefficient are reduced by receiving energy beam irradiation. By utilizing such a Si—O containing hydrogenated carbon film, various optical elements and optical devices including the same can be provided. |