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filingDate 2007-03-27-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate 2009-08-20-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-WO2007116770-A1
titleOfInvention Chemical mechanical polishing aqueous dispersion, chemical mechanical polishing method, and kit for preparing chemical mechanical polishing aqueous dispersion
abstract The aqueous dispersion for chemical mechanical polishing comprises (A) abrasive grains, (B) organic acid, (C) water-soluble polymer, (D) oxidizing agent, and (E) water, The weight average molecular weight of the molecule is 50,000 to 5,000,000.
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