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filingDate 2006-12-27-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate 2009-06-04-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-WO2007074875-A1
titleOfInvention Composite oxide film and method for manufacturing the same, composite body and method for manufacturing the same, dielectric material, piezoelectric material, capacitor, and electronic device
abstract A complex oxide film having a high relative dielectric constant, an arbitrarily controlled film thickness, and a small capacitance temperature dependence without using complex and large-scale equipment, a manufacturing method thereof, a composite including the complex oxide film, and It is an object of the present invention to provide a manufacturing method thereof, a dielectric material or piezoelectric material including the composite oxide film or composite, a capacitor or piezoelectric element including a composite oxide film having low temperature dependence, and an electronic device including the capacitor. A metal oxide layer containing titanium element is formed on the surface of the substrate by means such as anodic oxidation, and then a solution containing calcium ions is reacted with the metal oxide layer to form a composite oxide film containing titanium element and calcium element. Obtainable. Furthermore, it is possible to obtain a capacitor including the composite having the composite oxide film as a dielectric material and a piezoelectric element including the piezoelectric material.
priorityDate 2005-12-28-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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