http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2007074875-A1
Outgoing Links
Predicate | Object |
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classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01P2006-40 |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-8536 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01G23-006 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01G4-1227 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-078 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01G4-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-097 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-318 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-39 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01G23-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-43 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01G4-33 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-18 |
filingDate | 2006-12-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate | 2009-06-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-WO2007074875-A1 |
titleOfInvention | Composite oxide film and method for manufacturing the same, composite body and method for manufacturing the same, dielectric material, piezoelectric material, capacitor, and electronic device |
abstract | A complex oxide film having a high relative dielectric constant, an arbitrarily controlled film thickness, and a small capacitance temperature dependence without using complex and large-scale equipment, a manufacturing method thereof, a composite including the complex oxide film, and It is an object of the present invention to provide a manufacturing method thereof, a dielectric material or piezoelectric material including the composite oxide film or composite, a capacitor or piezoelectric element including a composite oxide film having low temperature dependence, and an electronic device including the capacitor. A metal oxide layer containing titanium element is formed on the surface of the substrate by means such as anodic oxidation, and then a solution containing calcium ions is reacted with the metal oxide layer to form a composite oxide film containing titanium element and calcium element. Obtainable. Furthermore, it is possible to obtain a capacitor including the composite having the composite oxide film as a dielectric material and a piezoelectric element including the piezoelectric material. |
priorityDate | 2005-12-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 56.