http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2007026545-A1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3277 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-517 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-545 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45595 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-1333 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-13 |
| filingDate | 2006-08-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2009-03-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-WO2007026545-A1 |
| titleOfInvention | Plasma discharge treatment apparatus and method for producing gas barrier film |
| abstract | The present invention provides a method for producing a highly functional film with reduced surface failure and improved yield, and a production apparatus therefor. This manufacturing apparatus is a plasma discharge processing apparatus that performs plasma discharge processing on the surface of a substrate that is continuously transferred between a winder and an unwinder under atmospheric pressure or a pressure near the atmospheric pressure. The surface to be treated of the material is a plasma discharge treatment apparatus that is conveyed in a contactless manner other than a nip roller that separates the discharge portion from the outside. In addition, the present invention provides a method for producing a gas barrier film having a high gas barrier property with reduced surface failure (cracking failure) at the time of forming the gas barrier thin film, which is a gas barrier thin film of the formed gas barrier film. The radius of curvature during conveyance on the side is 75 mm or more, and the radius of curvature of the opposite surface is 37.5 mm or more. |
| priorityDate | 2005-08-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 349.