abstract |
In the present invention, a composite oxide film is formed on the surface of a substrate by using a wet process, and the composite oxide film is washed with an acidic solution having a pH of 5 or less to reduce the carbonate in the composite oxide film. The present invention relates to a complex oxide film having a high dielectric constant and a method for manufacturing the same. Furthermore, a dielectric material and a piezoelectric material including the complex oxide film of the present invention, a capacitor including the material, a piezoelectric element, and an electronic device including these elements are provided. |