http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2007000799-A1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-07342 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R1-07378 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-073 |
| filingDate | 2005-06-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2009-01-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-WO2007000799-A1 |
| titleOfInvention | Contactor, contact structure including the contactor, probe card, and test apparatus |
| abstract | The probe card (30) includes a plurality of silicon finger contactors (50) that are in contact with pads provided on a semiconductor wafer to be tested, a probe substrate (40) on which the plurality of silicon finger contactors (50) are mounted, The silicon finger contactor (50) includes a base part (51) having a step (52) formed therein, a rear end side provided on the base part (51), and a front end side protruding from the base part (51). The silicon finger contactor (50) has a step (52) formed in the base part (51), and the conductive part (54) formed on the surface of the support part (53). The corner portions (52a, 52b) are mounted on the probe substrate (40) so as to be in contact with the surface of the probe substrate (40). |
| priorityDate | 2005-06-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 19.