http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2006118244-A1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2621 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R19-165 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-00 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 |
| filingDate | 2006-04-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2008-12-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-WO2006118244-A1 |
| titleOfInvention | FET characteristics measurement system |
| abstract | The IV characteristics of advanced FETs such as (SOI) MOSFETs, strained silicon MOSFETs, MOSFETs using high-k (high dielectric constant) gate insulating films are measured with higher accuracy. This is an FET characteristic measurement system that applies an output pulse of a pulse generator (3) having a voltage based on a set voltage (V_set) to the gate of the FET (1) and measures the drain current flowing through the FET (1) accordingly. . A divider (2) for dividing a pulse output from the pulse generator (3) into a first pulse applied to the gate of the FET (1) and a second pulse for voltage measurement; and a voltage of the second pulse A voltage measuring means (9) for measuring (V_meas) and a pulse generator for applying a pulse of a desired gate applied voltage (V_dut) to the FET (1) based on the voltage (V_meas) of the second pulse ( A setting voltage adjusting means (11) for determining a target setting voltage in 3) and adjusting the setting voltage (V_set) to the target setting voltage so that the voltage of the first pulse becomes a desired gate application voltage (V_dut); Is provided. |
| priorityDate | 2005-04-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5461123 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559541 |
Total number of triples: 14.