http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2005090511-A1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02024 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463 |
| classificationIPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
| filingDate | 2005-03-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2008-01-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-WO2005090511-A1 |
| titleOfInvention | Polishing composition and polishing method |
| abstract | An object of the present invention is to improve the polishing rate by a polishing composition containing silica fine particles, water, a basic substance, and an inorganic salt and a polishing method using the same in polishing treatment of a semiconductor substrate, a hard disk substrate and the like. I have to. This polishing composition can be produced by mixing silica fine particles, water, a basic substance, and an inorganic salt, but can also be obtained by adding an inorganic salt to a conventionally known silica fine particle-containing alkaline polishing composition. . At this time, inorganic salts include alkali metal salts such as KCl, K 2 SO 4 , KNO 3 , NaCl, Na 2 SO 4 , NaNO 3 , NH 4 Cl, NH 4 NO 3 , (NH 4 ) 2 SO 4 , An ammonium salt or the like is used. When an inorganic salt is added, the polishing rate is remarkably improved when the polishing composition does not generate an aggregate of silica fine particles. |
| priorityDate | 2004-03-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 40.