http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2005061566-A1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F212-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F212-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0395 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0392 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G61-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F212-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate | 2004-12-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2007-07-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-WO2005061566-A1 |
| titleOfInvention | Hyperbranched polymer and method for producing the same, and resist composition containing the hyperbranched polymer |
| abstract | The present invention provides a hyperbranched polymer suitable as a polymer material for nanofabrication centering on photolithography. The hyperbranched polymer of the present invention is characterized by having an acid-decomposable group such as p-tert-butoxystyrene bonded to a core portion formed by living radical polymerization such as chloromethylstyrene at the polymer molecule terminal. |
| priorityDate | 2003-12-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 670.