http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2005059203-A1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-2441 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-509 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-473 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-2406 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-509 |
| filingDate | 2004-12-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2007-07-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-WO2005059203-A1 |
| titleOfInvention | Transparent and highly gas-barrier substrate and method for producing the same |
| abstract | A transparent high barrier film having high gas barrier performance, excellent environmental durability, and which does not deteriorate even when bent is provided with high productivity. As a method for producing a substrate, in the method for producing a substrate having at least an organic layer and an inorganic layer on a support, the inorganic layer contains a thin film forming gas in a discharge space under atmospheric pressure or a pressure in the vicinity thereof. And applying a high-frequency electric field to the discharge space to excite the gas and exposing the substrate to the excited gas, the high-frequency electric field is formed by superimposing the first high-frequency electric field and the second high-frequency electric field. are those, wherein the first high frequency ω2 of the second high-frequency electric field than the frequency ω1 of the radio frequency electric field, strength V 1 of the first high frequency electric field, the intensity V 2 of the second high-frequency electric field The discharge start electric field strength IV satisfies V 1 ≧ IV> V 2 or V 1 > IV ≧ V 2, and the output density of the second high-frequency electric field is 1 W / cm 2 or more. It is a manufacturing method of material. |
| priorityDate | 2003-12-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 114.