http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-WO2005050320-A1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0046 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-091 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D133-16 |
| classificationIPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F20-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D133-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D133-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F16-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-09 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F216-12 |
| filingDate | 2004-11-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2007-12-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-WO2005050320-A1 |
| titleOfInvention | Method for forming resist laminate |
| abstract | A resist laminate having a sufficient antireflection effect in a photolithography process using light in the vacuum ultraviolet region and sufficient development characteristics in the development process is formed. (I) A step of forming a photoresist layer (L1) on a substrate, and (II) a coating composition containing a fluoropolymer (A) having a hydrophilic group Y is applied on the photoresist layer (L1). A method for forming a photoresist laminate comprising a step of forming an antireflection layer (L2), wherein the fluorine-containing polymer (A) is derived from a fluorine-containing ethylenic monomer containing a hydrophilic group Y. The fluorine-containing polymer (A) has a structural unit, and (i) the hydrophilic group Y has a pKa and contains an acidic OH group of 11 or less, and (ii) the fluorine content is 50% by mass or more. (Iii) The number of moles of the hydrophilic group Y in 100 g of the fluoropolymer (A) is 0.14 or more. |
| priorityDate | 2003-11-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 203.