abstract |
The present invention relates to a substrate made of a sintered body mainly composed of a ceramic material for forming a thin film mainly composed of gallium nitride, indium nitride, and aluminum nitride, and a thin film substrate on which the thin film is formed. By using a sintered body mainly composed of a ceramic material as a substrate, particularly a light-transmitting sintered body, at least one selected from gallium nitride, indium nitride, and aluminum nitride is used as a main component. A single crystal thin film with high crystallinity can be formed. In addition, a thin film substrate on which a single crystal thin film with high crystallinity is formed can be provided. Furthermore, by using a sintered body containing such a ceramic material as a main component, a light emitting element having excellent luminous efficiency can be provided. |