http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-S6386435-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5d7576285d411d00c697e07270d2814a |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-82 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-30 |
| filingDate | 1986-09-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5e09c28516a124e8fdf053d85260f7a0 |
| publicationDate | 1988-04-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-S6386435-A |
| titleOfInvention | Cleaning of x-ray mask |
| abstract | PURPOSE: To prevent any foreign matters from directly bonding to a mask by a method wherein an X-ray mask immediately after exposure is coated with a soblimating protective film to be removed together with any foreign matters. n CONSTITUTION: A mask substrate 10 is mounted on a holding ring 9 while X-ray absorbent layers 11 are provided on the mask substrate 10. Then, a sublimating protective film 12 is formed on the X-ray mask by dripping naphthalene ethylalcohol solution on the mask 10 for spincoating process. The X-ray mask 10 is spun round while being irradiated with thermal or photo energy 14 immediately before exposure, and vacuum suction and discharge of sublimated gas together with foreign matters 13 are performed. Next, immediately after cleaning process, the X-ray mask 10 is carried into an X-ray exposure device to be exposed and immediately after exposure, covered with the protective film 12 after making sure of no foreign matters on the mask 10. Through these procedures repeated, the X-ray mask with no foreignmatters bonded thereto can be made serviceable. n COPYRIGHT: (C)1988,JPO&Japio |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007503621-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012243869-A |
| priorityDate | 1986-09-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID452926995 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID22020562 |
Total number of triples: 18.