| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7e8aa91ae731e68fef41753f3ae1b383 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J2220-58
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J2220-49 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J20-3092
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J20-3204
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J20-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J20-041
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-68
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-1493
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J20-3236
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J20-0222 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J20-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D53-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D53-68
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D53-46 |
| filingDate |
1986-09-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4579425842f860ed30a51570e6d88c89
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_679e032b479d934de533ac80979f566f |
| publicationDate |
1988-04-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-S6380830-A |
| titleOfInvention |
Exhaust gas treatment agent in semiconductor industry |
| abstract |
PURPOSE:To obtain a solid treatment agent for exhaust gas, discharged from a semiconductor manufacturing process, generating no auto-deterioration with the elapse of time, by allowing an aqueous solution of alkali metal hydroxide to infiltrate into an alkaline earth metal hydroxide solid to an extent as to bring the carrier to a wet state. CONSTITUTION:Alkaline earth metal hydroxide such as calcium hydroxide is used as a carrier and an aqueous solution of alkali metal hydroxide such as an aqueous potassium hydroxide solution is mixed with the carrier to be infiltrated in the carrier to an extent as to bring the carrier to a wet state to prepare a solid exhaust gas treatment agent. A column is packed with this solid treatment agent and exhaust gas containing noxious gas such as silane gas exhausted from a semiconductor industry is allowed to flow through the column. The solid treatment agent thus prepared holds long-term stability and the treatment capacity there of the silane gas is not lowered with the elapse of time. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-03060510-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H09267027-A |
| priorityDate |
1986-09-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |