http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-S635541-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fd23ef28fbaec3bb07f40d0af79f7f98 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 |
| filingDate | 1986-06-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7ae9941ebfddbb55b946c5ad094c7eee |
| publicationDate | 1988-01-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-S635541-A |
| titleOfInvention | Semiconductor wafer measuring device |
| abstract | PURPOSE: To transmit the temperature of a sample placing stand to a sample to be measured without loss and to contrive to obtain highly accurate measured results by a method wherein the sample to be measured is fixed and supported on the surface of the temperature-controlled sample placing stand through a sheet-type metal plate having heat conductivity, electric conductivity and malleability. n CONSTITUTION: A heat generating unit which sets the temperature of a sample placing stand 5a at a controlled temperature and a sheet-type metal plate 5b; which is provided between the sample placing stand 5a and a semiconductor wafer to be measured and has heat conductivity, electric conductivity and malleability; are provided. As the metal plate 5b comes to have compatibility with the semiconductor wafer and the roughness of the contact surface of the sample placing stand 5a and is closely adhered to them by the malleability which the sheet-type metal plate 5b has, the temperature of the sample placing stand 5a can be transmitted to the sample to be measured without loss and highly accurate measured results can be obtained. Moreover, by adding a metal plate which is thin like about 0.2 mm and consists of indium and so on, measured results with higher accuracy can be obtained. n COPYRIGHT: (C)1988,JPO&Japio |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007288101-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017017135-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016095216-A |
| priorityDate | 1986-06-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5359967 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419578761 |
Total number of triples: 16.