http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-S63318136-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_80787665b837ed3eb503bbcd27c0043a |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 |
| filingDate | 1987-06-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_abdcc8a5cd82a01aff16dbd37302c8c8 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6c4f4dc8e9e6b2f0a50269746f4f2905 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e377f04eaedf1606a437074800ab8464 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f0183c9ea176a178184724bffe214c41 |
| publicationDate | 1988-12-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-S63318136-A |
| titleOfInvention | Microprobe measuring device |
| abstract | PURPOSE: To contact a metal needle to a wiring position without fail by a method wherein a metal needle is scanned above the desired wiring, the scanning signal obtained from the metal needle is detected, and the relative relation between the metal needle and the wiring is grasped. n CONSTITUTION: A metal needle 3 is brought close to the wiring 1 formed on a silicon substrate 2. The needle 3 is scanned from the left to the right, for example, under the above-mentioned state. At this time, the induced voltage generated on the metal needle 3 is observed. The induced voltage is induced by the high frequency voltage, for example, generated on a wiring through the electrostatic capacitance between the wiring 1 and the metal needle 3. The largest signal is obtained when the metal needle 3 is directly above the wiring 1. If this highest value is confirmed and the metal needle 3 is lowered, the metal needle 3 can be contacted to the wiring 1. When the wiring 1 has DC voltage, the tunnel current between the metal needle 3 and the wiring 1, or the metal needle is formed into a delicate thermoelectric couple, the temperature can be detected, and the title measurement can be conducted. n COPYRIGHT: (C)1988,JPO&Japio |
| priorityDate | 1987-06-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5461123 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559541 |
Total number of triples: 16.