http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-S63318122-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_80787665b837ed3eb503bbcd27c0043a |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-324 |
| filingDate | 1987-06-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_702a1600bf8481e6caf4fb3cdea66b88 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ca4a6f89debbaa91f095b8cb41cb94fe http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d05c915b760075570923989812da4db6 |
| publicationDate | 1988-12-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-S63318122-A |
| titleOfInvention | Manufacture of semiconductor substrate |
| abstract | PURPOSE: To form a crystal thin film of a compound semiconductor of good quality on an insulating substrate by placing a linear strip heater in the vicinity of the compound semiconductor thin film side on the insulating substrate, and heating the insulating substrate with an auxiliary heating source. n CONSTITUTION: On a substrate holder 101 in a crystal growth furnace 304, an evaporated InSb thin film 104 is provided so as to upwardly face. A nichrome wire 103 is provided in the position about 0.3mm above an indium oxide film 301 with both ends thereof being applied with a tension. In the position about 3cm thereabove, a halogen lamp 302 and a reflecting board 303 are provided. He is introduced from a gas introducing pipe 305, a substrate 102 is heated with the lamp 302, and simultaneously the nichrome wire is energized. The holder 101 is moved at a fixed speed by a motor 107, thereby to fusing the InSb thin film on the substrate 102 into the shape of a belt. With this, a crystal thin film of a compound semiconductor of good quality is formed on the substrate 102. n COPYRIGHT: (C)1988,JPO&Japio |
| priorityDate | 1987-06-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 17.