http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-S63298334-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_be055db3c1a09879df07379ba969e223 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-091 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-09 |
| filingDate | 1987-05-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_49af5196b78d3c177aa575a266ca2370 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1af7dd77e44a3851934d7250b1f76bc7 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c49950f6c8504adbec9ffdb18c4fd8c5 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_27f8b301f3479c283903d7821f6b2deb |
| publicationDate | 1988-12-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-S63298334-A |
| titleOfInvention | Anti-reflection material for substrate |
| abstract | PURPOSE:To obtain the titled material capable of forming a pattern which has a mask dimension and a high gamma value by adding an acridine derivative into a polymer of a novolak resin, etc. CONSTITUTION:The titled material is obtd. by mixing an acridine orange or an acridine yellow which has a large absorption for a far ultraviolet ray with the polymer such as the novolak resin, a phenol resin or a maleimide resin, etc., and a solvent. And, the additional amount of the acridine orange or the acridine yellow to the titled material is usually sufficient to less than a few percentage on the weight basis of the polymer. Thus the minute pattern which has the dimension in accordance with the mask design and a good profile without wear of the film, is obtd. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8992806-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109188866-A |
| priorityDate | 1987-05-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 23.