http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-S63297569-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_be055db3c1a09879df07379ba969e223 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J19-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01B3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-511 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01B13-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01F41-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-50 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-36 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-32 |
| filingDate | 1987-05-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_69bb1116db729885f37be7564f538496 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ef337cfffeca84d3999d8297a1368009 |
| publicationDate | 1988-12-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-S63297569-A |
| titleOfInvention | Manufacture of thin film |
| abstract | PURPOSE: To improve the characteristic of various thin films by simple operations, by applying a voltage to a substrate holder and controlling the incident energy of ions to be applied to a substrate. n CONSTITUTION: An electric power source 3 is connected to a conductive substrate-holding stand 2, and the incident energy of ions in ECR plasma from an ion-leading window 12 to be applied to a substrate 1 is controlled by means of the electric power source 3. The frequency of a microwave oscillator 9 is regulated, and then, hydrogen and nitrogen are introduced from an ionizing gas-introducing hole 10 and a reactant gas is introduced from a reactant gas- introducing hole 11 so as to form a thin film on the substrate 1. By this method, the characteristics of an iron-carbide film, etc., such as magnetic properties and corrosion resistance, can be easily improved. n COPYRIGHT: (C)1988,JPO&Japio |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H02249210-A |
| priorityDate | 1987-05-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 26.