http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-S6328033-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_be055db3c1a09879df07379ba969e223 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-208 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-324 |
| filingDate | 1986-07-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1a7fc2b448b8a126d9e370bdc27d1a1f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0159f58292d8b2570e1732d6336a4a38 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b6a2f40e3992f00a1a3e17b56ca4f078 |
| publicationDate | 1988-02-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-S6328033-A |
| titleOfInvention | Method for protecting surface of substrate |
| abstract | PURPOSE: To effectively protect the surface of a substrate by using a melt in which phosphide of tin is melted in the tin when suppressing the thermal decomposition of the surface of the phosphide by applying a phosphorus pressure with tin melt including phosphorus. n CONSTITUTION: A melt in which the phosphide of tin is melted in the tin is used as the melt when suppressing the thermal decomposition of the surface of the phosphide placed near a tin melt including phosphorus by applying phosphorus pressure to protect the surface of a substrate in case of epitaxial growth and heat treating at high temperature, such as diffusing. Since the solubility of P in Sn does not decrease by the addition of solute made of phosphide of the Sn, the phosphorus pressure can be maximized to utilize the effect of protecting the substrate to the maximum limit. n COPYRIGHT: (C)1988,JPO&Japio |
| priorityDate | 1986-07-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 21.