http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-S63277755-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_be055db3c1a09879df07379ba969e223 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01B13-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01F41-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-203 |
| filingDate | 1987-05-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_69bb1116db729885f37be7564f538496 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ef337cfffeca84d3999d8297a1368009 |
| publicationDate | 1988-11-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-S63277755-A |
| titleOfInvention | Production of thin film |
| abstract | PURPOSE: To stably produce a thin compd. or alloy film with high controllability when a thin film is formed on a substrate by the decomposition of a gaseous starting material, by sputtering a target so as to incorporate the component of the target into the thin film. n CONSTITUTION: Gases for ionization such as hydrogen and nitrogen are introduced into an ionization chamber 13 from the gas inlet 10 and a gaseous starting material such as ferrocene [(C 5 H 5 ) 2 Fe] is introduced into a reaction chamber 5 from the reactive gas inlet 11 with a carrier gas. Plasma is generated by electron cyclotron resonance and the gaseous starting material is decomposed by the plasma to form a thin film of iron carbide or the like on a substrate 1. At this time, a target 3 of Co or the like is sputtered by impressing voltage from a power source 4 for sputtering to form a thin film of iron carbide contg. Co. The resulting thin film has improved characteristics such as increased coercive force. By this method, various elements can be incorporated into a thin film and a thin compd. or alloy film can easily be formed. n COPYRIGHT: (C)1988,JPO&Japio |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4531331-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H0816266-B2 |
| priorityDate | 1987-05-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 27.