http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-S63262644-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5d7576285d411d00c697e07270d2814a |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0757 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G77-60 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-075 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G77-60 |
| filingDate | 1987-04-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4abbb1c7edd8c85d7ff97dc97d955079 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e359a3dca53665e65b6ed40d52ff787a |
| publicationDate | 1988-10-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-S63262644-A |
| titleOfInvention | Resist material for fine working |
| abstract | PURPOSE:To improve the sensitivity, the resolution and the dry etching property of the titled material against a high energy ray by composing the titled material from a silicone polymer contg. a specified repeating unit and an another repeating unit, and by specifying the ratio of said repeating units. CONSTITUTION:The titled resist contains the silicone polymer having the repeating units shown by formulas I and II respectively, and has a weight average mol.wt. of >=20,000, and said ratio of the repeating unit shown by formula I to that shown by formula II is (3/7)-(7/3). In formula I, R<1> is fluorocarbon group, R<2> is 4-10C a satd. hydrocarbon group, R<3> is a satd. hydrocarbon or an aromatic org. group. In formula II, R<4> and R<5> are each a satd. hydrocarbon group or an aromatic org. group. The titled material has the improved solubility to a solvent usable for preparing a resist solution and the improved developing property and the large absorption coefficient against the high energy ray, and has high sensitivity by introducing the fluorocarbon group in the side chain structure of the polysilane. |
| priorityDate | 1987-04-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID411556313 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11638 |
Total number of triples: 17.