http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-S63257239-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_80787665b837ed3eb503bbcd27c0043a |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-067 |
| filingDate | 1987-04-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_67fbb3df0a255093e8e8c79feaef9444 |
| publicationDate | 1988-10-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-S63257239-A |
| titleOfInvention | Inspection device using probe |
| abstract | PURPOSE: To set a probe perpendicularly without being restricted by an arrangement of an electrode on an object to be inspected, by a method wherein an inspection operation of the object to be inspected by using the probe is executed with the spiral-shaped probe. n CONSTITUTION: A probe 1 is to be spiral-shaped as a whole. This probe 1 is constituted by forming a wire material of a metal such as tungsten, beryllium- copper, paralladium or the like to be spiralshaped. One end of this probe 1 is inserted into a hole 2a made in a substrate 2; by this setup, the probe 1 is fixed to this substrate 2 in such a way that its central axis is perpendicular to the surface of the substrate 2. In addition, one end of a shaft 3 is inserted into a hole 2b made in the substrate 2; by this setup, the shaft 3 is fixed to the substrate 2 in such a way that its central axis is perpendicular to the surface of the substrate 2. n COPYRIGHT: (C)1988,JPO&Japio |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6150616-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-9739361-A1 |
| priorityDate | 1987-04-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID425762086 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23964 |
Total number of triples: 16.