http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-S63249143-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_630b360599ea5cf4b5bcbc0c6c0a3e2d |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-022 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03C1-72 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-022 |
| filingDate | 1987-04-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_694ad052d6ca226313d725c94511c49d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9b08b30342543537cc70844af95b5abf |
| publicationDate | 1988-10-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-S63249143-A |
| titleOfInvention | Positive type photoresist composition |
| abstract | PURPOSE:To obtain the titled composition having good preservative stability and good coating property on a wafer by controlling the content of each compositions contd. in the mixture of a photosensitive compd. having quinone diazide group, respectively. CONSTITUTION:As a specified high polymer by-product which exists in the mixture or is formed during the preparation of the preservation of the titled composition induces faulty coating property, the quinone diazide type photosensitive compd. contg. <=3wt.% by-product which has the mol.wt. of 1.5 times of the compd. having the max. theoretical mol.wt. is incorporated in the titled composition. The photosensitive compd. having the quinone diazide group is exemplified by orthobenzoquinone diazide and parabenzoquinone diazide, etc. Thus, the faulty coating property of the titled composition caused by redepositing the photosensitive compd. which dissolves in a solvent once, can be solved, in case when the titled composition is preserved for a long time. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5151339-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H0346814-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-S6449038-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5358823-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5132376-A |
| priorityDate | 1987-04-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 24.