http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-S6312947-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ac6ae0c7ffe17b038d7eb3c23cae0a0d |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-18 |
| filingDate | 1986-07-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6d0a8e4357ac55351618a0927522a687 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_66e860df266376b4700555e8408be2f2 |
| publicationDate | 1988-01-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-S6312947-A |
| titleOfInvention | Thermal conduction detector |
| abstract | PURPOSE: To execute a gas analysis with high accuracy by providing a slit in the vicinity of a heat radiation resistance part so that the turbulence of gas flow is eliminated. n CONSTITUTION: To a silicon wafer chip 1 in which a heat radiation resistance part 2 and a slit 3 are formed, a glass plate 4 provided with gas passageway use thin holes 4a, 4b and a gas passageway use thin groove 5 is laminated and welded by pressure. In such a state, at the time of allowing gas to flow out and flow in through the thin holes 4a, 4b, the resistance part 2, the slit 3, and the thin groove 5 are made to coincide and laminated so that gas passes through the resistance part 2 and the slit 3, and a gas passageway 5a is formed. Also, to the opposite side of the chip 1, a protective glass plate 6 is welded by pressure. As a result, gas passes through the thin hole 4a, the thin groove 5, and the gas passageway 5a through a pipe 7 which is fitted into the thin holes 4a, 4b, and flows out of the thin hole 4b. When gas passes through the resistance part 2, a temperature is detected by the resistance part 2, and a result of this detection is analyzed by an external analyzing device which is not shown in the figure, and a gas analysis is executed with high accuracy. n COPYRIGHT: (C)1988,JPO&Japio |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H0696787-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H02101186-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H0552782-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H0288786-A |
| priorityDate | 1986-07-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 24.