http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-S6240376-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5547f741b25666fc4ae5195cf71a979b |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-50 |
| filingDate | 1985-08-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b33f17128201803f6868150bbce94322 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b995f6ba19a6664334e36ea593593e6f |
| publicationDate | 1987-02-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-S6240376-A |
| titleOfInvention | Method for synthesizing cubic boron nitride |
| abstract | PURPOSE: To easily synthesize a cubic boron nitride by applying a static magnetic field to the gaseous plasma generated in the stage of synthesizing cubic boron nitride from a gaseous mixture composed of boron hydride, ammonia, nitrogen and hydrogen by high-frequency plasma excitation. n CONSTITUTION: The gaseous mixture composed of B 2 H 6 and NH 3 diluted to about 1W5% gaseous H 2 is supplied at the flow rate specified by each flow rate controller 7 to a plasma generating part wound with a high-frequency induction coil 3 of a quartz reaction vessel 1. The plasma generating part is adequately cooled with the water passed to a water cooling part 2 and the gaseous H 2 is passed along the tube wall. An air core coil 9 is provided on the outside to generate a static magnetic field. On the other hand, a support 6 for a substrate 4 is rotated by a rotating device 5 and the specified pressure in the vessel 1 is maintained by a vacuum evacuation device 8 to form the cubic boron nitride film on the substrate 4. The compounding ratio of the reactive gases is made about B 2 H 6 :NH 3 :N 2 :H 2 =0.08W1.0:2.3W14.0:4.6-W27.7:55W93. The total flow rate is made about 500cc/minW5.0l/min. n COPYRIGHT: (C)1987,JPO&Japio |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H03111573-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5130549-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5681418-A |
| priorityDate | 1985-08-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 28.