| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_38520f366e74704305b34fb93a81121e |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0757 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-075
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G77-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G77-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G77-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-30 |
| filingDate |
1986-06-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_04f8330435c3de57393a5bb3a817e904
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2207f9cf4d60935339c52f1ce1c5bee8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_91e7dc7da9889ee72645b0bf28a0ba6e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1a0ea6d927e4c138a9b64bcc3d06cf07 |
| publicationDate |
1987-12-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-S62283128-A |
| titleOfInvention |
Poly(allylsilsesquioxane) and production thereof |
| abstract |
PURPOSE:To obtain a poly(allylsilsesquioxane) soluble in organic solvent, by hydrolyzing allyltrichlorosilane with sodium bicarbonate and carrying out the polycondensation of the resultant prepolymer using a tertiary amine. CONSTITUTION:The objective poly(allylsilsesquioxane) of formula can be produced by (1) hydrolyzing allyltrichlorosilane with sodium bicarbonate in a mixture of an ether solvent (e.g. diethyl ether) and water and (2) subjecting the resultant prepolymer to polycondensation with a tertiary amine (e.g. triethylamine) in a ketone solvent (e.g. methyl isobutyl ketone). A film of the obtained poly(allylsilsesquioxane) is resistant to thermal curing even in the absence of silylation treatment and keeps the solubility in organic solvent. It is suitable as a resist for electron radiation, etc. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H0582934-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-S63210839-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H01308429-A |
| priorityDate |
1986-06-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |