http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-S62249006-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_80787665b837ed3eb503bbcd27c0043a |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B21-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B21-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G05D3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-68 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-67 |
| filingDate | 1986-04-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_15b60ad90afa984fb309a71b47ca46f1 |
| publicationDate | 1987-10-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-S62249006-A |
| titleOfInvention | Positioning device |
| abstract | PURPOSE: To improve the positioning accuracy of a movable part by providing a position detector for detection a position in the feeding direction of the movable part, in the vicinity of a guide surface of the moving part, and also, on the center shaft of the movable part in the feeding direction. n CONSTITUTION: The titled device is constituted so that a position detecting mechanism (a position detecting mechanism 9) are positioned on the upper surface of an X base 2 (a Y base 3), namely, in the vicinity of a guide surface of a middle stage X table 4 (a middle stage X table 6), and also, on the center shaft in the feeding direction of the middle stage X table 4 (the middle stage Y table 6). Therefore, for instance, comparing with the case of installing the position detector 8 (the position detector 9) in parallel to the feeding direction to the side face part of the middle stage X table 4 (the middle stage table 6), a position detecting error of the position detector 8 (the position detector 9) caused by yawing, etc., of the middle stage X table 4 (the middle stage Y table 6) is reduced, and positioning of the upper stage table 5 is exactly executed. n COPYRIGHT: (C)1987,JPO&Japio |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016170284-A |
| priorityDate | 1986-04-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID122034 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415821907 |
Total number of triples: 17.