| abstract |
PURPOSE:To form a pattern having high sensitivity and high resolution by providing a layer contg. a monomolecular film of a polymerizable compd. or the cumulative film thereof via an intermediate layer on a substrate and applying energy to said layer, thereby polymerizing the same to a pattern shape. CONSTITUTION:The layer contg. the monomolecular film 6 of the polymerizable compd. or the cumulative film 8 thereof is provided via the intermediate layer 20 on the substrate 5 and the energy is applied to the layers 6, 8 to polymerize the same to the pattern shape. The polymerizable compd. 1 used here is the compd. having respectively at least one hydrophilic parts 2, hydrophobic parts 3 and polymerizable parts 4 in the molecule. The polymerizable compd. 1 is preferably exemplified by a diacetylene deriv. compd. which is the compd. expressed by R-CidenticalC-CidenticalC-(R1)n-X, where R, R are the hydrophobic part, X is the hydrophilic part and n is 0 or 1. |